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progress during a next crisis, including another quarantine. Underscored by the
pandemic, two draft SEMI
standards are underway.
• Intel and Cimetrix are leading SEMI Draft Document
6566, Specification for Malware-Free Equipment Integration, refining it to define
protocols for pre-shipment
scans of equipment as well
as various types of ongoing
support including file transfers, maintenance patches,
and component replacement.
Importantly, the team’s aim
is for the desired standard
to introduce steps to “harden” equipment software and
make it less vulnerable to
cyberattacks. The measures
will be evaluated against
third-party frameworks, such
as the National Vulnerability
Database (NVD) and Common Vulnerability Scoring
System (CVSS).
• TSMC and Industrial Technology Research Institute
(ITRI) are leading SEMI
Draft Document 6506, Specification for Cybersecurity of
Fab Equipment, which defines
a common, minimum set of
security requirements for fab
equipment. The standard will
provide a baseline focusing on
four major components of fab
equipment: operating systems,
network security, endpoint
protection, and security monitoring. Once approved by the
global SEMI Information and
Control Committee, the goal
will be to scale requirements
as malware threats evolve.
www.semiconductordigest.com
INFICON’s Metrology Sampling Optimizer
Takes on the Automotive Industry’s Zero
Defect Challenge
INFICON introduced the Metrology Sampling Optimizer (MSO) this
week at SEMICON West 2020. The Metrology Sampling Optimizer
uses real time data and factory conditions to determine what material
to measure to reduce scrap risk and optimize measurement capacity
allocation. Utilizing user-defined rules that
leverage practical
constraints and
real time information, MSO
decides when to
measure specific
material as a
function of tool
jeopardy, sampling coverage
goals and real time process health information like SPC trends and FDC
state of health. The sampling plans update in real time to manage sampling for the entire facility and guarantee continuously relevant results
amidst the dynamic conditions of the facility. This is critical to meeting
the requirements set by the automotive industry, which are driving towards zero shipped defects to support safe autonomous vehicles.
Legacy sampling systems are limited; they apply rules in isolation and
fail to adapt to important tool events and changing factory conditions
causing operational inefficiencies. MSO minimizes sampling by evaluating all related rules whenever a rule triggers sampling. All related rules
that would be cleared by a single measurement are reset even though they
may not be due yet. MSO is integrated with INFICON’s Smart Digital
Twin and leverages its Factory Scheduler to provide additional features
and superior excursion management.
Integration with the Factory Digital Twin, the Factory Scheduling
System, and Advanced Process Control Systems allows MSO to drive
critical or blocking material through measurement as quickly as possible.
Integration with Fault Detection Systems, such as FabGuard FDC, or
Excursion Management Systems is done to identify material that could be
at risk when a defect excursion occurs. This accelerates identification of
at-risk material and minimizes the impact of excursions.
MSO also provides simple to interpret dashboards which help engineers
determine their metrology and defect scan coverage, the mean time to
excursion detection, and the number of at-risk lots or substrates. The MSO
Dashboard enables immediate action to manage sampling and excursions.
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