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equipment.
explains how the netzero platform
However, one relatively new entry
“Sustainability is a production
can identify the processes with the
into the world of sustainable manuimperative. From abating fluorinated highest carbon footprint, pinpoint
facturing is the use of digital twins
inefficiencies, and propose targeted
gases to securing clean power and
to create virtual fabs, optimizing
improvements.
closing the loop on water, manEarth-friendly and cost-effective
There are numerous well-esufacturers now treat energy and
solutions.
water use as critical process levers,”
tablished methods to enhance the
For example, Dassault Systèmes
explains Stephen Russell, senior
sustainability of semiconductor
and Lam Research, through a
technical fellow, sustainability,
manufacturing processes, including
partnership with Purdue University,
at TechInsights. “The next
are developing “virtual twin
wave will be ‘abatement by
experiences” to accelerate
design’ tools and chemistries
semiconductor training,
that embed efficiency into
research, and sustainability.
fabs, with real-time carbon
How are virtual twins difaccounting shaping customer
ferent from digital ones? The
scorecards and regulatory
difference is more than just
compliance.”
semantic. A virtual fab model
“In pushing the envelope
can simulate energy, water,
of sustainable manufacand chemical flows in a chip
turing, we’re focusing not
fab. These simulations can
just on marginal gains, but
help identify sustainability
Figure 1. The imec.netzero framework provides
on fundamentally rethinking
hotspots before implemena comprehensive life cycle analysis of IC
how fabs—and their supply
tation, thereby balancing
manufacturing, assessing multiple impact
chains—consume and return
trade-offs between yield,
factors, including energy consumption, water
resources to the planet,”
throughput, and eco-footprint.
use, and chemical emissions. The dual-layer
reflects Jim Straus, vice
Dassault Systèmes makes a
view covers both wafer processing and facility
president of sales at ACM
distinction between digital
operations, offering actionable data to identify
Research. “By designing
and virtual twins, noting that
high-impact processes and propose effective
tools and processes that slash
while the former is a virtual
sustainability strategies.
chemical use, reclaim solreplica of physical assets, a
the adoption of more energy-effivents, and drastically reduce water
virtual twin incorporates real-world
cient systems, water conservation
and energy waste, we can help the
data, leveraging advanced simumeasures, chemical recycling,
industry move toward net-zero
lation and modeling capabilities on
and renewable energy strategies
impact without compromising
top of the digital twin model.
for reducing power consumption.
performance.”
Regardless of the names, virtual
For example, TSMC Arizona has
Imec has introduced a “netzero”
and digital twins are improving the
broken ground on an advanced
web application framework (https://
competitiveness and sustainability
Industrial Water Reclamation Plant
netzero.imec-int.com/) to provide a
of existing and future semiconquantified view of the environmental designed to achieve “Near Zero
ductor fabs. These technologies
Liquid Discharge,” meaning it aims
impact of high-volume chip manuwill also aid in chip production
to reuse nearly every drop of water.
facturing for various technologies
as the industry transitions from
(See, “Creating Semiconductor
(Figure 1). Using the framework,
isolated efficiency projects to sysManufacturing Solutions with
companies can analyze various simtem-wide strategies. Sustainability
Sustainability in Mind”) https://
ulated sustainability scenarios and
is now a competitive advantage,
www.semiconductor-digest.com/
demonstrate real-world examples
vital for compliance, achieving
creating-semiconductor-manufacof environmental impact reduction,
ESG goals, ensuring supply
turing-solutions-with-sustainabilicovering lithography, etch, and wet
chain resilience, and driving
ty-in-mind/
processes. In a recent article, imec
profitability.
20 | Thursday, October 9
www.semiconductordigest.com
